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14. USING A LINEAR SERVO MOTOR
14 - 1
14. USING A LINEAR SERVO MOTOR
WARNING
When using the linear servo motor, read "Linear Servo Motor Instruction Manual"
and "Linear Encoder Instruction Manual".
14.1 Functions and configuration
14.1.1 Summary
The fields of semiconductor/LCD manufacturing systems, mounters, and others have strong demands for
high accuracy, high speed, and efficiency. Therefore, the number of systems using a linear servo motor for a
drive axis has been increasing. Since the linear servo system can obtain the characteristics of the high
speed and the high acceleration/deceleration greater than the ball screw drive system. The linear servo
system also does not have a ball screw wear which is a weak point in the ball screw drive system. This will
extend the life of the equipment. In addition, since a response error due to backlash and friction does not
occur, you can establish a high-accuracy system.
The following shows the differences between the linear servo motor and the rotary servo motor.
Category Item
Differences
Remarks
Linear servo motor Rotary servo motor
External I/O signal FLS (Upper stroke limit),
RLS (Lower stroke limit)
Required (for
magnetic pole
detection)
Not required Automatically turns on in the
parameter setting.
Motor pole
adjustment
Magnetic pole detection Required Not required
(default setting)
Automatically executed at the first
servo-on after the power is turned
on.
For the absolute position linear
encoder, [Pr. PL01] can disable the
magnetic pole detection. The timing
of the magnetic pole detection can
be changed with [Pr. PL01]. (Refer
to (2) (b) of section 14.3.3.)
Home position
return
Reference home position 1048576 pulses unit
(initial value)
One servo motor
revolution unit
Home position return pitch can be
changed with parameter setting.
(Refer to section 14.3.3)
Absolute position
detection system
Absolute position encoder
battery
Not required Required The following alarms and warnings
are not provided for the linear servo
motor.
[AL. 25 Absolute position erased]
[AL. 92 Battery cable
disconnection warning]
[AL. 9F Battery warning]
[AL. E3 Absolute position counter
warning]
Auto tuning Load to motor inertia ratio
(J)
Load to motor mass
ratio
Load to motor
inertia ratio
MR Configurator2
(SW1DNC-MRC2-E)
Motor speed
(Data display and setting)
mm/s unit r/min unit
(Software version
1.19V or later)
Test
operation
function
Positioning
operation
Supported Supported
Motor-less
operation
None Supported
JOG operation None Supported
Program
operation
Supported Supported