Filter
Top Products
7. SPECIAL ADJUSTMENT FUNCTIONS
7 - 30
7.4 Compliance with SEMI-F47 standard
POINT
The control circuit power supply of the servo amplifier can be possible to comply
with SEMI-F47 standard. However, a back-up capacitor may be necessary for
instantaneous power failure in the main circuit power supply depending on the
power supply impedance and operating situation.
Use a 3-phase for the input power supply of the servo amplifier. Using a 1-
phase 100 V AC/200 V AC for the input power supply will not comply with SEMI-
F47 standard.
The external dynamic brake cannot be used for compliance with SEMI-F47
standard. Do not assign DB (Dynamic brake interlock) in [Pr. PD07] to [Pr.
PD09]. Failure to do so will cause the servo amplifier to become servo-off when
an instantaneous power failure occurs.
Be sure to perform actual machine tests and detail checks for power supply
instantaneous power failure of SEMI-F47 standard with your equipment.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of MR-J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the
capacitor in case that an instantaneous power failure occurs during operation.
(1) Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47 function.
Parameter
Setting
value
Description
PA20 _ 1 _ _ SEMI-F47 function selection
PF25 200
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
occurrence.
Enabling SEMI-F47 function will change operation as follows.
(a) The voltage will drop in the control circuit power with "Rated voltage × 50% or less". 200 ms later,
[AL. 10.1 Voltage drop in the control circuit power] will occur.
(b) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 7.1 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
Servo amplifier Bus voltage which triggers alarm
MR-J4-10B(-RJ)
to
MR-J4-700B(-RJ)
158 V DC
MR-J4-11KB(-RJ)
to
MR-J4-22KB(-RJ)
200 V DC
MR-J4-60B4(-RJ)
to
MR-J4-22KB4(-RJ)
380 V DC
(c) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control circuit
power] occurs.