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6.2 One-touch tuning .............................................................................................................................. 6- 3
6.2.1 One-touch tuning flowchart ........................................................................................................ 6- 3
6.2.2 Display transition and operation procedure of one-touch tuning ............................................... 6- 4
6.2.3 Caution for one-touch tuning ...................................................................................................... 6- 8
6.3 Auto tuning ........................................................................................................................................ 6- 9
6.3.1 Auto tuning mode ....................................................................................................................... 6- 9
6.3.2 Auto tuning mode basis ............................................................................................................. 6-10
6.3.3 Adjustment procedure by auto tuning ....................................................................................... 6-11
6.3.4 Response level setting in auto tuning mode ............................................................................. 6-12
6.4 Manual mode ................................................................................................................................... 6-13
6.5 2 gain adjustment mode .................................................................................................................. 6-16
7. SPECIAL ADJUSTMENT FUNCTIONS 7- 1 to 7-38
7.1 Filter setting ...................................................................................................................................... 7- 1
7.1.1 Machine resonance suppression filter ....................................................................................... 7- 2
7.1.2 Adaptive filter II ........................................................................................................................... 7- 5
7.1.3 Shaft resonance suppression filter ............................................................................................. 7- 7
7.1.4 Low-pass filter ............................................................................................................................ 7- 8
7.1.5 Advanced vibration suppression control II ................................................................................. 7- 8
7.1.6 Command notch filter ................................................................................................................ 7-13
7.2 Gain switching function .................................................................................................................... 7-15
7.2.1 Applications ............................................................................................................................... 7-15
7.2.2 Function block diagram ............................................................................................................. 7-16
7.2.3 Parameter .................................................................................................................................. 7-17
7.2.4 Gain switching procedure ......................................................................................................... 7-20
7.3 Tough drive function ........................................................................................................................ 7-24
7.3.1 Vibration tough drive function.................................................................................................... 7-24
7.3.2 Instantaneous power failure tough drive function ..................................................................... 7-26
7.4 Compliance with SEMI-F47 standard .............................................................................................. 7-30
7.5 Model adaptive control disabled ...................................................................................................... 7-33
7.6 Lost motion compensation function ................................................................................................. 7-34
7.7 Super trace control .......................................................................................................................... 7-37
8. TROUBLESHOOTING 8- 1 to 8- 8
8.1 Explanation for the lists ..................................................................................................................... 8- 1
8.2 Alarm list ........................................................................................................................................... 8- 2
8.3 Warning list ....................................................................................................................................... 8- 7
8.4 Troubleshooting at power on ............................................................................................................ 8- 8
9. OUTLINE DRAWINGS 9- 1 to 9-22
9.1 Servo amplifier .................................................................................................................................. 9- 1
9.2 Connector ........................................................................................................................................ 9-20
10. CHARACTERISTICS 10- 1 to 10-14
10.1 Overload protection characteristics .............................................................................................. 10- 1
10.2 Power supply capacity and generated loss .................................................................................. 10- 5
10.3 Dynamic brake characteristics ...................................................................................................... 10- 8