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STP-H600/H1000 Series Instruction Manual
12.4 Inspecting for Deposit
When inspecting for deposit, exhaust gases inside the STP pump thoroughly.
Residual gases may cause an accident when removing the STP pump.
Confirm the characteristics of gas to be used, referring to the Material Safety
Data Sheet (MSDS) you obtain from the gas supplier.
Wear personal protective equipment if necessary.
Leaving the STP pump without removing the deposit may cause the STP
pump to be corroded beyond repair.
Deposit may have accumulated inside the STP pump depending upon the type of the vacuum
equipment installed in the STP pump. An increase in the amount of deposit may lead to a
malfunction of the STP pump.
Therefore, perform regular maintenance (once every 3 to 6 months as a target).
Inspect the inside of the outlet port flange for adhesion of deposit while watching the outlet
port flange. If deposit has accumulated to some extent, an overhaul (cleaning) is required.
Contact Seiko Instruments.
Note that the costs of troubleshooting problems resulting from deposit will be at your own
charge even during the warranty period.
If a problem resulting from deposit occurs inside the STP pump, hermetically seal inlet port,
outlet port, purge port, and leak port flanges, and immediately return them to Seiko
Instruments.
For the transport method, see Section 12.6, "Transport for Repair or Overhaul."
Contact with atmospheric air may cause a reaction of the deposit. DO NOT
open the STP pump to atmospheric air as much as possible.
Seiko Instruments supplies you the Temperature Management System (TMS)
unit to keep the temperature high inside the STP pump and prevent the
accumulation of deposit.
For details, contact Seiko Instruments.
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