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STP-H600/H1000 Series Instruction Manual
3 Installation of the STP pump
3.1 Name and Function of Each Part
(1) Inlet Port Flange (ICF
*1
, VG
*2
, ASA, ISO, etc.)
l Connected to the vacuum equipment (at the high vacuum side).
C
A
U
TI
O
N
A splinter shield is attached to the inlet port flange to prevent foreign particles
from falling into the STP pump.
NEVER remove it.
(2) Outlet Port Flange (KF
*2
40)
l Connected to the inlet port side of the auxiliary pump.
(3) STP Connector (41 pins)
l Connected to the STP connection cable.
(4) Motor Connector (5 pins)
l Connected to the motor connection cable.
(5) Purge Port (KF
*2
10)
l Introduces a purge gas.
In order to protect the inside of the STP pump when sucking reactive or
corrosive gases.
The STP pump is delivered with a blank flange attached to this port.
(6) Cooling Water Port (PT
*2
(R/C)1/4 Female Screw)
l Connected to the STP pump cooling water pipe.
This port is used when water cooling the STP pump.
(7) Emergency Vent. Valve
l Protects the STP pump.
It functions immediately after any abnormality/error occurs inside the STP
pump.
(8) Ground Terminal
l
Used for grounding.
Connect the ground cable between this terminal and the ground terminal of the
STP control unit .
The ground terminal is marked with label
.
(9) Temperature Sensor Connector (optional accessory)
l A temperature sensor is attached.
For use with the Temperature Management System (TMS) unit only.
*1
: JVIS
*2
: JIS
3-1