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STP-H600/H1000 Series Instruction Manual
Table 6.3 Safety Functions
[E.V. used herein is the abbreviation for Emergency Vent.]
Abnormality
/Error
Operation state of safety
functions
Lamp indication
REMOTE
output signal
State of the STP pump
Probable causes of an
abnormality/error
Power failure Failure time: 2 seconds or
more (for details, refer to
Section 6.1.1, "Power
Failure").
"BATTERY
OPERATION"
"EMERGENCY
OPERATION"
"ALARM"
"E.V. valve
OPEN
signal"
Levitation continues by battery.
The STP pump stops.
The E.V. valve functions at
approx. 7000 rpm.
The rotor lands on the touch down
bearing at approx. 2000 rpm.
Power failure.
Power cable breakage.
Power cable disconnection
Abnormal
magnetic
bearing
Rotor descends onto the
touch down bearing.
"EMERGENCY
OPERATION"
"ALARM"
"E.V. valve
OPEN
signal"
The E.V. valve is opened.
The STP pump stops.
STP connection cable breakage.
STP connection cable
disconnection.
Abnormal control circuit.
Excessive
vibration
Rotor vibration:
100 mm p-p or more.
"EMERGENCY
OPERATION"
"ALARM"
"E.V. valve
OPEN
signal"
The E.V. valve is opened.
The STP pump stops.
External vibration, and impact.
Intrusion of atmospheric air.
Intrusion of foreign materials.
Overload of
inverter
Current of more than 40A
flows into the inverter
momentarily or current of
more than 11.5A flows into
the inverter continuously
for 15 minutes.
"FAILURE" "ALARM" The inverter stops.
The STP pump continues to rotate
by inertia.
Leakage from the vacuum
equipment or piping.
Insufficient pressure at inlet
and outlet port sides.
Failure of starting of the
auxiliary pump.
6-8