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STP-H600/H1000 Series Instruction Manual
TABLE OF CONTENTS
SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump ..................................... 1-1
1.1 Usable Gases............................................................................................................ 1-1
1.2 Maintenance Precautions.......................................................................................... 1-1
1.3 Inspection Precautions.............................................................................................. 1-2
1.4 Labels........................................................................................................................ 1-2
2 Unpacking.................................................................................................. 2-1
2.1 Unpacking the STP Pump......................................................................................... 2-1
2.2 Unpacking the STP Control Unit ............................................................................... 2-2
3 Installation of the STP pump...................................................................... 3-1
3.1 Name and Function of Each Part.............................................................................. 3-1
3.2 Precautions Before Installation ................................................................................. 3-3
3.2.1 Operating Environment ................................................................................ 3-3
3.2.2 Installation Area ........................................................................................... 3-4
3.2.3 Bench........................................................................................................... 3-4
3.3 How to Install the STP Pump .................................................................................... 3-5
3.3.1 Cleaning the Seal......................................................................................... 3-6
3.3.2 STP Pump Installation Positions.................................................................. 3-7
3.3.3 How to Secure the STP Pump ..................................................................... 3-8
3.3.4 Vacuum Piping........................................................................................... 3-12
3.3.5 Connecting the Emergency Vent. Valve .................................................... 3-14
3.3.6 Connecting the Purge Port......................................................................... 3-14
3.3.7 Connecting the Ground Cable.................................................................... 3-15
4 Installation of the STP Control Unit............................................................ 4-1
4.1 Name and Function of Each Part.............................................................................. 4-1
4.1.1 Front Panel................................................................................................... 4-1
4.1.2 Rear Panel ................................................................................................... 4-4
4.1.3 Inside of the STP Control Unit...................................................................... 4-6
4.2 Precautions Before Installation ................................................................................. 4-8
4.2.1 Operating Environment ................................................................................ 4-8
4.2.2 Installation Area ........................................................................................... 4-9
4.3 Attaching the STP Control Unit Front Panel to a Rack ........................................... 4-10
4.4 Cable Connection.................................................................................................... 4-11
4.4.1 Name and Dimensions of Each Cable....................................................... 4-11
4.4.2 How to Connect the Cables ....................................................................... 4-13
5 How to Start/Stop the STP Pump .............................................................. 5-1
5.1 Before Starting .......................................................................................................... 5-1
5.2 Starting/Stopping Time.............................................................................................. 5-1
5.3 Start Procedures ....................................................................................................... 5-2
5.4 Stop Procedures ....................................................................................................... 5-2
5.5 Manual Operation...................................................................................................... 5-3
5.5.1 Powering ON................................................................................................ 5-3
5.5.2 Starting the STP Pump ................................................................................ 5-3
5.5.3 Stopping the STP Pump............................................................................... 5-3
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