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STP-H600/H1000 Series Instruction Manual
NOTICE
The STP pump cannot be used with the outlet port open to atmospheric air.
Always use the auxiliary pump (dry pump or similar one).
Use an auxiliary pump with a pumping speed of 240 L/min or more.
Depending upon the type of the auxiliary pump used, oil vapor may contaminate
the inside of the STP pump. Some oil viscosity could cause a malfunction
when there is a strong reverse flow of oil.
Take the following measures to ensure the correct flow of oil:
· Attach a vacuum valve to the middle of the piping between the STP pump
outlet port flange and the auxiliary pump.
· Attach an absorption trap adjacent to the vacuum valve.
3.3.1 Cleaning the Seal
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing
the STP pump in the vacuum equipment.
Take the following measures for cleaning the seals:
· Clean off with a pure gas.
· Wipe with proper solvent (such as alcohol).
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A splinter shield is attached to the inlet port flange to prevent foreign particles
from falling into the STP pump.
Always leave the splinter shield attached during operation.
NOTICE
The splinter shield cannot perfectly prevent foreign materials from falling into the
STP pump.
DO NOT install the STP pump in such a manner that foreign materials can
easily fall into it (for example, Si wafers or samples are positioned above the
STP pump). If installing the STP pump in such a manner, always attach a
shield plate with sufficient conductance above the STP pump to prevent foreign
materials from falling into it. Foreign materials falling into the STP pump
through the splinter shield may result in product damage.
Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the
STP pump.
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