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STP-H600/H1000 Series Instruction Manual
Abnormality
/Error
Operation state of safety
functions
Lamp indication
REMOTE
output signal
State of the STP pump
Probable causes of an
abnormality/error
Overheating
inside the
STP pump
Temperature of the STP
pump motor: 110 or
more
"OVER
TEMPERATURE"
"FAILURE"
"ALARM" The STP pump stops. Abnormal baking temperature.
Insufficient cooling.
Leakage of vacuum equipment
or piping.
Continuous repetition of
startup/shutdown.
Extraordinarily-high
temperature.
Overheating
inside the
STP control
unit
90 or more in the STP
control unit and heat sink.
"FAILURE" "ALARM" The STP pump stops. Failure in the cooling fan.
Shielding of cooling air inlet
and ventilation port.
Extraordinarily-high
temperature
Overspeed
Rotational speed of the STP
pump:37,500 rpm or more.
"FAILURE" "ALARM" The STP pump stops. Failure in the inverter.
Abnormal
battery
terminal
voltage
Battery terminal voltage:
42 V or lower
*1
"FAILURE"
*2
("EMERGENCY
OPERATION" or
"BATTERY NG"
lamp may light)
"ALARM" The STP pump does not start. Incorrect connection of the
battery.
Battery capacity became less
than operating limit value.
*1
: When capacity of battery is less than operating limit value largely, there may be the thing that battery abnormal detection does not operate.
*2
: When the power is turned on again, this lamp goes out.
6-9