Filter
Top Products
STP-H600/H1000 Series Instruction Manual
No. Symptom Probable Causes Countermeasures
Referred
Section
(1) Baking temperature
overheat.
Set the temperature to
120 or lower.
7.3
(2) Insufficient cooling. Always cool during baking
or gas suction.
7.2
(3) Power failure. Check if power has failed. 6.1.1
(4) Over vibration
(5) (vibration 100 mm p-p
or more).
After the STP pump stops
thoroughly, power OFF
and remove external
vibration so as not to
transmit it to the STP
pump.
6.1.3
(6) Overheating inside the
STP control unit.
1) Ambient
temperature
2) Insufficient
cooling of the STP
control unit.
Remove heat source or
shield for air route.
1) Keep ambient
temperature 40 °C or
lower.
2) Remove obstacles at
the ventilation port.
If the air cooling fan
is broken, contact
Seiko Seiki.
4.2.1
4.2.2
12.2
(7) Improper pressure of
the inlet port.
Use the maximum
working pressure or less.
3.3.4
16.1
2 The STP pump
stops.
(8) Improper pressure of
the outlet port.
Use the allowable backing
pressure or less.
3.3.4
16.1
3 Rotor falls during
operation.
(1) Failure of the STP
connection cable.
Inspection is needed.
Contact Seiko Seiki.
4.4.2
(2) Failure of the battery. Inspection is needed.
Contact Seiko Seiki.
9
10
4 Ultimate pressure
is insufficient.
(1) Failure of the auxiliary
pump.
Check the auxiliary pump
for its capacity and
START state.
(use a pump with the
recommended capacity or
more).
3.3
16.1
(2) Leakage of the piping
system.
Check the piping system. 3.3.4
(3) Residual molecule. If the main composition is
H2 or H2O, perform
baking; if it is other than
H2 or H2O, clean the
inside of the vacuum
equipment
(If gases remain inside
the STP pump, contact
Seiko Seiki when it is
needed to be cleaned).
7.3
12.4
15-4