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STP PUMP PROBLEM CHECK SHEET
Contact your nearest Seiko Seiki’s office shown in the rear cover.
To : Company Name : Date :
Contact Name :
TEL. Number :
FAX. Number :
Address :
From: Customer Name :
Date :
Person in charge :
TEL. Number :
FAX. Number :
Address :
Model Name :
STP
-
Inlet Flange Type : Length of Connection Cable:
m
Input Voltage:
V
M/C No. : Manufacturing Date : Other:
Check Items State/Result
STATE OF PROBLEM
Abnormality Warning
OVER TEMPERATURE
(while the vacuum chamber is in operation, etc.)
(Check lamps being lit)
BATTERY OPERATION
OTHER INFORMATION
FAILURE
EMERGENCY
OPERATION
BATTERY NG (inside
panel)
Pump Noise
Yes / No
Vibration
Yes / No
Heat
Yes / No
Choke Water
Yes / No
Deposition
Yes / No
Control Unit Next Battery
Replacement Date
YY / MM
Power Failure
Time
Min.
Blown Fuses
Yes / No
(Fuse No. F )
Heat
Yes / No
Other Used Gas
Pump Installation
Position
Vertically / Horizontal
Upside-down
Other
( )
Leakage
Yes / No
TMS Unit
Yes / No
Seiko Seiki Comment :
Date . .
Name Job No.