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STP-H600/H1000 Series Instruction Manual
3.2 Precautions Before Installation
3.2.1 Operating Environment
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Chlorine or fluorine system gases can be used in chemical specific pumps (type
C). When you use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, Sn, or HBr, contact Seiko Instruments.
NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
STP-H600/STP-H1000 pump or other models without anti-corrosion treatment
(see Section 1.1, "Usable Gases").
Install the STP pump in a place meeting the following requirements:
Ambient Temperature 0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment l A place free of externally-applied mechanical shock.
l A place free of a heat source
(Keep clean of the heat source or attach a thermal
shield plate).
l A place free of a strong magnetic field
(Range: up to 15mT (150G) in the axial direction,
and up to 3mT (30G) in the radial direction with
respect to the rotational axis of the STP pump).
l A place free of a strong electric field.
l A place free of exposure to radiation.
l No discharge of high voltage (more than 500 V)
(If more than 500 V is discharged, contact Seiko
Instruments).
STP Pump Installation
Equipment Conditions
l Install the STP pump securely so that foreign
particles will easily fall into the STP pump (Ex.: Si
wafers or samples are positioned above the STP
pump) (To prevent foreign particles from falling into
the STP pump, design a shield plate with large
conductance).
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