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STP-H600/H1000 Series Instruction Manual
INTRODUCTION
Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The
turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust
gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-H600/H1000 turbomolecular pump:
Model Name Specification
· STP-H600 High-throughput type
· STP-H1000 High-throughput type
· STP-H600C High-throughput type, chemical specific
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· STP-H1000C High-throughput type, chemical specific
For the specifications of other models of the STP-H600/H1000 pump series, contact Seiko
Instruments.
In this manual, the above STP pump series is collectively referred to as the “STP pump.”
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
Applied Directives
· EC Machinery Directive
· EC Electromagnetic Compatibility Directive
· EC Low Voltage Directive
Applied Standards
· EN292-1
· EN292-2
· EN60204-1
· EN55011 (class A)
· EN50082-2
Applied Standards (Only a some model)
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· UL3101-1,1993 (Electrical Equipment for Laboratory Use; Part 1 : General
Requirements)
*1
Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)
*2
Contact Seiko Instruments about recognized model.
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