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MT-17E-003-D
Seiko Instruments Inc.
Dec. 2001
Copyright 2001 Seiko Instruments Inc. All rights reserved. Printed in Japan.
STP-H600/H1000 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Third Edition-d)
Read through the Safety Precautions of this Manual
carefully before using the STP pump.
Keep this Manual in a place where you can quickly access
it at any time.