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3-11
3-7 REPLACEABLE PARTS
The following is a list of replaceable parts for the Varian HS-20 Diffusion Pump.
Part Number Description
84358301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST
660811494 Cold cap gasket (see Figure 3-2)
F2622001 Cold cap follower (brass)
75786001 Cold cap nut
622445026 Cold cap female coupling,
1
⁄2
-inch OD tube x
3
⁄8
-inch FPT, Imperial Flexfitting No. 66-FL
L6367301 Sprint coupling
84350301 Jet coupling assembly
84889301 Foreline baffle assembly
F6097301 Sight glass service kit (includes glass tube, O-rings, and fittings; valves not included)
(for pumps built prior to October 1994)
F1755301 Sight glass assembly (includes seal valve, glass tube, removable bracket, cover for
sight glass assembly, and fittings) (for pumps built prior to October 1994)
77261001 Threaded plug, fill and drain
K9050001 Upper thermal switch, 185°F
K9050002 Lower thermal switch, 390°F
656118114 Nickel wire, No. 14 AWG
648056329 Nickel lug for No. 14 AWG
647320025 Heater element with leads (2000W, 200V)
647320020 Heater element with leads (2000W, 240V or 380V)
647320035 Heater element with leads (2000W, 400V)
647320040 Heater element with leads (2000W, 430V)
647320045 Heater element with leads (2000W, 440V)
647320030 Heater element with leads (2000W, 480V)
K7108001 Crush plate (replace with each heater)
K7107001 Clamping plate
L6514001 Insulation for heaters – Cerablanket 0.50 inch thick
84497001 Heater cover plate
L9223001 Sight glass (for pumps built after October 1994)
K0377165 O-ring kit; includes:
1 butyl ASA inlet flange O-ring (84349002
1 butyl ASA foreline flange O-ring (660893432)
8 Viton fill and drain O-rings (660892213)
1 Sight glass O-ring (660892240)
1 Graphite sight glass gasket (L9228001)
695472008 DC-702 diffusion pump fluid (one-gallon container)
695474008 DC-704 diffusion pump fluid (one-gallon container)
695475008 DC-705 diffusion pump fluid (one-gallon container)