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WARNING
_____________
High voltages (up to 480 V) can kill. Always break the primary circuit to
the power supply before starting to work on the heater and/or its wiring.
WARNING
_____________
Diffusion pumps are typically cleaned with acetone, alcohol, or other
solvents.
When heated, sprayed or exposed to high temperature equipment,
these solvents become flammable and explosive, causing serious injury
or death. Do Not Use Near A High-Temperature Source. Ventilate
working area with a blower and use in large, well-ventilated room. When
heated or sprayed, acetone also becomes 4 to 5 times heavier than air
and will flow down, settling in tanks, pits, and low areas, thus displacing
air which can kill by asphyxiation. Use in a large, well-ventilated room.
Use of a self-contained breathing apparatus may be necessary.
Acetone, alcohol, and other solvents are irritants, narcotics, depres-
sants, and/or carcinogenics. Their inhalation and/or ingestion may pro-
duce serious effects. Prolonged or continued contact with the skin will
result in absorption through the skin and moderate toxicity. Always
ensure that cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
WARNING
_____________
Varian has no control over the types of gases passing through
this pump. These are entirely under the control of the process user
and/or the hardware systems integrator. Frequently, process gases are
toxic, flammable, corrosive, explosive, or otherwise reactive. Since
these gases can cause serious injury or death, it is very important to
plumb the exhaust of the pump to the facility’s hazardous gas exhaust
system which incorporates appropriate filters, scrubbers, etc., to insure
that the exhaust meets all air and water pollution control regulations
WARNING
_____________
Certain gases can become corrosive and toxic when trapped in oil.
Always wear protective gloves when handling dirty pump oil, drain it into
a closable container, and do not breathe the fumes of the oil. Always
use fully self-contained breathing apparatus.