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STE 58792
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Table of Contents
Page
Section 1 Cautions on Safety ............................................................................ 5
Section 2 Clean Robot Basic specifications ...................................................... 6
2.1 Basic Robot Specifications........................................................... 6
2.2 Outer Dimensions ........................................................................ 7
2.3 Operating Range and Coordinate System ................................... 9
2.4 Tool Wiring and Piping ................................................................. 10
2.4.1 Tool Wiring........................................................................... 10
2.4.2 Tool Air Piping...................................................................... 10
Section 3 Measure against Dust........................................................................ 11
3.1 Specific Measures........................................................................ 11
3.2 Scavenging Piping in the Robot ................................................... 12
3.3 Sealing Robot Cover .................................................................... 13
Section 4 Maintenance and Inspection.............................................................. 14
4.1 Maintenance and Inspection Items............................................... 14
4.2 Lubricating Tool Shaft and Tool Shaft Support Bearing ............... 14
4.3 Replacement Parts List for Maintenance of Robot Mechanism.... 15