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20
7 TROUBLESHOOTING
TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS
Faulty operation of 4-
way solenoid valve
1 Inspect and repair or replace. a Install quick exhaust valves if
damaged by corrosive gas
Wrong wiring or
disconnection in
proximity sensor
1 Inspect and correct wiring.
2 Replace if shorted.
a Check if the three wires are
arranged as in the manual.
b Check air piping & wiring
orientation.
Bellows are damaged 1 Replace pump.
a Check if supply air pressure is
within the specification.
b Check if the pump stroke speed is
within the specification.
c Check if liquid temperature is
within the specification.
d Check if residual pressure is
removed upon pump stoppage.
e Check for narrow & long air
piping.
f Check for restricted suction pipe.
Increased discharge
pressure
1 Inspect filter and replace it.
2 Discharge side valve is closed.
a Check filter for clogging or dry-up.
b Check if filter is sufficiently
wetted.
a Open discharge side valve.
Pump does not
operate.
Supply air pressure or
volume is reduced.
1 Set back to initial set value
(Reset).
a Set pressure higher than min.
operation pressure for 4-way
solenoid valve.
b Secure a diameter and air flow
rate in consideration of the
number of pumps installed.
Filter is not venting. 1 Check filter vent.
2 Open vent line.
a Install an automatic venting
system for the filter.
Valve is clogged with
foreign matter (such as
fragments of wafer, etc)
1 Replace pump.
2 Suction side valve is closed.
a Install pump guard filter or the
like on pump suction piping.
a Open suction side valve.
Check if valve is blocked with
crystallized substance.
Pump operates but
no liquid is
discharged
Wear of valve or valve
seat.
1 Replace pump.
Supply air pressure or air
volume is reduced.
1 Set back to initial set value or
review air flow rate.
a Secure a diameter & air flow rate in
consideration of the number of
pumps installed.
Increased discharge
pressure.
1 Review discharge conditions. a Check filter for clogging or dry-up.
b Check if air is removed from the
filter sufficiently.
c Check if discharge side valve is
open or restricted.
Valve is clogged with
foreign matter.
1 Replace pump head. a Install pump guard filter or the like
on pump suction pipe.
Discharge volume
is reduced.
Insufficient NPSHa. 1 Check suction a Check if suction pipe is adequate